- Fraunhofer Institute for Electronic Nano Systems ENAS
- Fraunhofer Institute for Manufacturing and Applied Materials IFAM, Dresden Branch
- Fraunhofer Institute for Integrated Circuits IIS, Design Automation Division EAS
- Fraunhofer Institute for Ceramic Technologies and Systems IKTS in Dresden-Gruna and Dresden-Klotzsche
- Fraunhofer Institute for Photonic Microsystems IPMS
- Fraunhofer Institute for Material and Beam Technology IWS
- Fraunhofer Institute for Reliability and Microintegration IZM, All Silicon System Integration Dresden IZM-ASSID